发明名称 |
Micro-electro-mechanical device with buried conductive regions, and manufacturing process thereof |
摘要 |
A MEMS device formed by a body; a cavity, extending above the body; mobile and fixed structures extending above the cavity and physically connected to the body via anchoring regions; and electrical-connection regions, extending between the body and the anchoring regions and electrically connected to the mobile and fixed structures. The electrical-connection regions are formed by a conductive multilayer including a first semiconductor material layer, a composite layer of a binary compound of the semiconductor material and of a transition metal, and a second semiconductor material layer. |
申请公布号 |
US9388038(B2) |
申请公布日期 |
2016.07.12 |
申请号 |
US201414265116 |
申请日期 |
2014.04.29 |
申请人 |
STMicroelectronics S.r.l. |
发明人 |
Campedelli Roberto;Pezzuto Raffaella;Losa Stefano;Mantovani Marco;Azpeitia Urquia Mikel |
分类号 |
H01L29/84;B81B7/00;B81B3/00;B81C1/00 |
主分类号 |
H01L29/84 |
代理机构 |
Seed Intellectual Property Law Group PLLC |
代理人 |
Seed Intellectual Property Law Group PLLC |
主权项 |
1. A MEMS device comprising:
a body; a cavity above the body; first and second anchoring regions; a mobile structure above the cavity and coupled to the body by the first anchoring regions; a fixed structure above the cavity and coupled to the body by the second anchoring regions; first and second electrical-connection regions between the body and the first and second anchoring regions, respectively, the first electrical-connection region being electrically coupled to the mobile structure and the second electrical-connection region being electrically coupled to the fixed structure, wherein the first and second electrical-connection regions have a conductive multilayer that includes a first semiconductor material layer, a composite layer of a binary compound of a semiconductor material and of a transition metal, and a second semiconductor material layer; and protection regions laterally covering only the sides of the first and second electrical-connection regions. |
地址 |
Agrate Brianza IT |