| 摘要 |
A driving apparatus comprises a stator (21), a rotor (22) and a deformation connector (23). The rotor is connected to the stator through the deformation connector. An external driving force drives the deformation connector to have deformation so that the rotor changes its position with respect to the stator. Under the condition that no external driving force is applied, the deformation connector remains at a force balanced position (x0). The force on the deformation connector comprises a deformation force (F1) of the deformation connector and a first primitive force (F2) in opposite direction to the deformation force (F1). Also provided is a device fabrication method. Because the deformation connector keeps balance under the effect of the deformation force and the first primitive force, a small external driving force is required when the driving apparatus operates near the balance point, thereby reducing power consumption. |
