| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement device and a measurement method of an optical element enabling the shape measurement of both surfaces of a measurement object to be measured by a three-dimentional shape measurement with a sensing pin and other methods without causing deformation on the surface even if the sensing pin is in a thin plate shape.SOLUTION: An orthogonal energizing member 47 fixed to a base plate 20 energizes a measurement object WO from a first surface 1a side to a base plate 20 side at a load generating position P1 which faces three support projections 22d by sandwiching the measurement object WO with respect to a support direction, and as a result, can reduce a stress generated in the measurement object WO. Side supporting members 41a, 141a can abut on a side surface 2t of the measurement object WO in a state of being movable in the direction vertical to the support direction in a surface 20a side of the base plate 20. Since the movement to the direction vertical to the support direction is suppressed by a frictional force generated upon receipt of a pressing force to the support direction, the measurement object WO can be held so as not to move in the surface 20a side of the base plate 20 with respect to the direction vertical to the support direction in a state of being hardly applying a load to the side surface 2t of the measurement object WO.SELECTED DRAWING: Figure 2 |
