| 摘要 |
A particle-beam device has a beam axis and is exposed to mechanical movements. The device also has a column assembly for housing electro-optical equipment needed for focus the particle beam and a support structure for supporting the column assembly. A damping system for damping the mechanical movements has a plurality of elastic pressure vessels communicating with the support structure and the column for holding the column. The damping system includes fluid actuating means connected to the pressure vessels for actuating the pressure vessels in response to the mechanical movements. |
