| 摘要 |
The system for generating microwave power suitable to reduce photoresist by generating the high density and low ionic microwave, includes a DC power source, a magnetron head receiving a high energy power from the DC power source to output the microwave, a wave guide transmitting the microwave from the magnetron head to a load, a stub tuner fulfilling a impedance matched by controlling the length of a tuner, a coupler monitoring the matching state between the microwave and the load from the magnetron head, a dummy load absorbing the heat due to the reflected microwave to emit it, a quartz tube for generating plazma, a cooling pin, a cooling line, an N2 cooling port, a cover for protection, a wave guide side cover and a heat sensor. The system increases the life of the magnetic head by reducing reflected microwaves and improves the device yield by eliminating impure particles in a chamber.
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