摘要 |
PURPOSE: To control the density of a green sheet, to control shrinkage at the time of firing and to improve the dimensional precision of a ceramic substrate by selecting the kind and amt. of a solvent used at the time of forming the green sheet. CONSTITUTION: Powdery ceramic stock such as alumina powder, a sintering aid such as SiO2 , a resin such as butyral resin, a plasticizer such as dibutyl phthalate, etc., are slurried with a solvent and a green sheet is formed. At this time, the density of the green sheet is controlled by selecting the kind and amt. of the used solvent such as xylene, toluene or methanol. The green sheet is then worked in a desired shape with a cutter, etc., and through holes are formed with a punching die, etc. After printing with conductor paste, a prescribed number of such green sheets are laminated, press-bonded under heating and fired in a reducing atmosphere to obtain the objective ceramic substrate. |