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发明名称
CONTINUOUS MEASUREMENT OF THE THICKNESS OF HOT THIN FILMS
摘要
申请公布号
CA898625(A)
申请公布日期
1972.04.25
申请号
CAD898625
申请日期
申请人
WESTERN ELECTRIC COMPANY, INCORPORATED
发明人
CONRAD A. CLARK;JAMES F. ROBERTS;AUSTIN C. DUMBRI
分类号
C23C14/54;C23C16/52;G01B11/06;(IPC1-7):G01B11/06
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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