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发明名称
THIN FILM DEPOSITION SYSTEM
摘要
申请公布号
US3701682(A)
申请公布日期
1972.10.31
申请号
USD3701682
申请日期
1970.07.02
申请人
TEXAS INSTRUMENTS INC.
发明人
WILLIAM W. GARTMAN;JAMES G. EVANS;HAROLD A. ALLEN
分类号
C30B25/14;(IPC1-7):B01J17/30
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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