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发明名称
SHUSEKIKAIROPERETSUTONOJIDOICHIGIMEHOHO
摘要
申请公布号
JPS51102467(A)
申请公布日期
1976.09.09
申请号
JP19750027528
申请日期
1975.03.05
申请人
NIPPON ELECTRIC CO
发明人
TAMAI TSUYOSHI
分类号
H01L21/68;G05D3/00;G05D3/12;H01L21/60
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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