| 摘要 |
PURPOSE: To easily perform high speeding positioning without generating a large vibration, by forming respectively a guide means in a direction of each axis of XYZ and a guide means in a direction around each axis of XYZ into a contactless static pressure bearing. CONSTITUTION: A 4-axis static pressure θZT stage is mounted on an X stage 51 of a static pressure XY stage. A Y stage 54, by supplying air to a static pressure air bearing, is floated from a surface plate 55, and by two drive actuators 54c arranged in both sides thereof, the Y stage is moved in a Y direction along a fixed guide 52 provided in one side. The X stage 51, by supplying air to a static pressure air bearing, similarly floats the Y stage 54 from the surface plate 55, to move the X stage in an X direction by a drive actuator 51c with a side surface 54b of the Y stage 54 serving as a guide in a horizontal direction. Here are adjusted the X stage 51 and the Y stage 54 so as to be always in a fixed attitude by a plurality of preload use magnet units 56. |
