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发明名称
METHOD OF LOWERING SPECIFIC RESISTANCE OF DOPED POLYCRYSTALLINE SILICON FILM
摘要
申请公布号
JPS5575225(A)
申请公布日期
1980.06.06
申请号
JP19790151946
申请日期
1979.11.22
申请人
RCA CORP
发明人
CHIYUN PAO UU
分类号
H01L21/20;H01L21/268;H01L21/321
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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