| 摘要 |
PURPOSE: To manufacture a lithium secondary battery positive electrode with high film-adhesion property and excellent characteristic of battery by forming a metal oxide film containing lithium on an electrode substrate by jointly using vapor deposition of a lithium containing material and ion beam irradiation. CONSTITUTION: A lithium-containing material is vaporized from a vaporizing source 3 inside a vacuum chamber 1 having an exhaust device 7, and a vaporized material 3a is vapor-deposited on an electrode substrate S mounted on a base holder 2. At the same time, ion beams are irradiated on the substrate S from an ion source 4. A lithium-containing metal oxide film is formed on the substrate S. As the lithium-containing metal oxide, LiMn2 O4 , LiWO3 , LiCoO2 , LiNiCoO, and LiV2 O5 are used. This ion beam is preferably formed by using an inert gas or an oxygen gas as a raw gas, and an accelerating energy of 100eV-500KeV. By using the lithium-containing metal oxide film as the positive electrode of a lithium secondary battery, the mobility of a lithium ion on the inside hardly drops and desirable battery characteristics is easily obtained. |
