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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPS6230891(A)
申请公布日期
1987.02.09
申请号
JP19850169828
申请日期
1985.08.02
申请人
HITACHI LTD
发明人
SASAKI ICHIRO;ITO FUMIKAZU
分类号
H01L21/302;C23F4/00;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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