| 摘要 |
<p>PURPOSE:To enable a state of abrasive grains to be grasped in dicing by a method wherein a dicing blade is equipped with a surface roughness measuring mechanism by which surface roughness of said blade is measured. CONSTITUTION:A surface roughness measuring device 5 is established to a side of a dicing blade 1, and surface roughness of the dicing blade 1 is measured with a contact needle 5a extending to an edge of the dicing blade 1. This contact needle 5a is capable of expansion and contraction, for instance, in a horizontal direction normal to an output axis, and can be transferred not to disturb dicing operation. Further, this surface roughness measuring device 5 has a computer built-in, and whether a measured value is not less than or under a critical value is mechanically judged. In that case, when the measured value is not less than the critical value, abrasive grains exist enough. Then, dicing is continued. When under the critical value, the abrasive grains have slipped off and there is a fear of blade cracking. Therefore, the dicing is interrupted and the dicing blade 1 is exchanged.</p> |
