CYCLISCHE ODER BICYCLISCHE ALUMINIUM-, GALLIUM-, ODER INDIUM-ORGANISCHE VERBINDUNGEN UND IHRE VERWENDUNG ZUR GASPHASENABSCHEIDUNG DES METALLS AUF SUBSTRATEN.

摘要

New organometallic cpds. are 1-alumina-, 1-inda- or 1-galla-aza -phospha-, -arsa- or -stiba-(bi)cyclo-paraffin cpds. of formula (I): w here R1 and R2 independently = H, linear or branched 1-7C alkyl, fluoroalkyl or perfluoroalkyl, 3-8C cycloalkyl, alkenyl or cycloalkenyl or (substd.) phenyl; M = Al, In or Ga; Y = N, P, As, or Sb; m = 2, 3 or 4; n and o = 0 or 1; n = o = 1.