发明名称 THREE-DIMENSIONAL INTEGRATED CIRCUIT INDUCTOR
摘要 PROBLEM TO BE SOLVED: To increase an inductor and reduce an area and a volume by a method, wherein there is provided the inductor in which a plurality of first and second conductor wires and a conductive via are positioned relatively, in order to form successive conductive coils around a magnetic core. SOLUTION: In an inductor, a plurality of first planar conductor wires 10 are separated from a second pair of planar conductor wires 70 by a magnetic core 40. Both the pairs of planar conductor wires are electrically connected to each other by a conductive via 60, and a loop encircling the magnetic core 40 is formed. Further, an insulation layer in which the magnetic core 40 is respectively separated from the conductive wires 10, 70 is formed. Here, the magnetic core 40 is selected from a group containing a Permalloy (R) and a ferromagnetic body and is disposed horizontally on a substrate. Further, first and second conductor wires 10, 70 have an 'L'-shaped configuration, respectively.
申请公布号 JPH08250332(A) 申请公布日期 1996.09.27
申请号 JP19960013440 申请日期 1996.01.30
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 CHIYAN MIN SHIE;RUISU RII CHIEN SHIYUU
分类号 H01F10/14;H01F10/12;H01F10/13;H01F10/18;H01F10/187;H01F17/00;H01F41/04;H01L21/822;H01L23/522;H01L27/04;H01L27/06 主分类号 H01F10/14
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