PROCESSING CHAMBER POLLUTION DETECTOR,申请号JP19930057690-传众专利搜索

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发明名称	PROCESSING CHAMBER POLLUTION DETECTOR
摘要
申请公布号	JPH06252018(A)	申请公布日期	1994.09.09
申请号	JP19930057690	申请日期	1993.02.23
申请人	KOKUSAI ELECTRIC CO LTD	发明人	TOYODA KAZUYUKI
分类号	G01R27/18;H01L21/02;H05H1/00;(IPC1-7):H01L21/02	主分类号	G01R27/18
代理机构		代理人
主权项
地址

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