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发明名称
PREPARATION PROCESS OF PHASE SHIFT OPTICAL MASK
摘要
申请公布号
KR970001693(B1)
申请公布日期
1997.02.13
申请号
KR19940021647
申请日期
1994.08.30
申请人
HITACHI MFG KK.
发明人
OKAMOTO, YOSHIHIKO
分类号
G03F1/26;(IPC1-7):G03F1/08
主分类号
G03F1/26
代理机构
代理人
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