| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to execute plural treatments with one chamber and to adequately executing a waste liquid treatment as well for each of the respective treating liquids without occurrence of undesirable reaction as a result of mingling of different kinds of the treating liquids to be used with each other by moving master disks to a treating liquid recovering vessel and subjecting these master disks to the prescribed treatment, then successively transferring the master disks to the next treating liquid recovering vessel and subjecting the master disks to the respective prescribed treatments. SOLUTION: The optical disk master disk treating device is provided with the one chamber 1. This chamber internally has a turn table 3 on which the glass master disks 2 are placed and which rotates the master disks, plural liquid supply nozzles 4 which are vertically moved by the driving of nozzle vertical driving means and inner cups 5a, 5b, 5c, 5d which recover the treating liquids splashed by centrifugal force from the master disk surfaces. Four pieces of the inner cups are disposed to correspond to four pieces of the treating liquid supply nozzles 4. |
