发明名称 IMAGE DATA INSPECTING METHOD AND APPARATUS
摘要 An image data inspecting method detects whether or not a pattern described by a first image data (D1) and a pattern described by a second image data (D2) match. This method includes the steps of (a) carrying out a sizing process on the first and second image data so that the patterns described thereby are at least enlarged or reduced by the same amount, and (b) comparing the first and second image data which are processed in the step (a) to determine whether or not the processed first and second image data (D1A, D2A) match. <IMAGE>
申请公布号 KR960013357(B1) 申请公布日期 1996.10.04
申请号 KR19910019551 申请日期 1991.11.05
申请人 FUJITSU KK. 发明人 MATSUI, SHOGO;KOBAYASHI, KENICHI
分类号 G01N21/88;G01B11/00;G01N21/93;G01N21/956;G03F1/08;G03F1/84;G06T1/00;G06T7/00;H01L21/027;H01L21/30;(IPC1-7):G06F15/02 主分类号 G01N21/88
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