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发明名称
Method for producing a thin film resistor
摘要
申请公布号
EP0603782(B1)
申请公布日期
2001.05.09
申请号
EP19930120507
申请日期
1993.12.20
申请人
CANON KABUSHIKI KAISHA
发明人
KOYAMA, SHUJI;KAWAJIRI, YUKIO;SHIBATA, MAKOTO;SUEOKA, MANABU;SUZUKI, TOSHIO;YAMAMOTO, HISASHI;SUZUKI, TAKUMI
分类号
H01C7/00;B41J2/14;B41J2/16;C23C14/56;H01C17/06;H01C17/08;H01C17/12;H01L21/822;H01L27/04;(IPC1-7):H01C7/00;B41J2/05
主分类号
H01C7/00
代理机构
代理人
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地址
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