| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that because when a belt etc. used in a conventional transfer robot are set in a high temperature and a high vacuum environment, organic substances are evaporated and released to the outside to degrade the product yield of semiconductor devices, if several magnetic seals are stacked and provided on a movable part to prevent this, the size and the weight of the transfer robot increase, and if a belt mechanism is used, the three dimensional shape of an arm must be of a long slender box. SOLUTION: In the transfer robot, the rotation pivot of a drive means for a body of the robot and an end effector are connected with a wire in place of a conventional belt mechanism, and the end effector is turned interlocked by the turning of the wire about the central axis thereof. COPYRIGHT: (C)2005,JPO&NCIPI
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