| 摘要 |
PROBLEM TO BE SOLVED: To realize an electrically charged particle beam drawing method which can improve a drawing figure accuracy (uniformity) by performing drawing so that the influence of a dotage may become constant, even if the dotage based on the deviation of an electron beam and the dotage of the electronic beam based on a coulomb reaction force arise. SOLUTION: When a desired pattern is drawn by the shots of two times of the electron beams and the pattern of a field core is drawn, the drawing positions of the first time and the second time are slightly shifted. This mount of the shift is shifted reversely to each other from a predetermined current beam position every 1/4 of the amount of the dotage of the beam in a field corner. As a result, as shown in the bottom stage of Fig. (c), even if it is the field core which does not have the dotage in the beam, the relation equivalent to the relation can be made between a resulting beam strength which performed heavy drawing twice with the beam having the dotage in the field corner as shown in Fig. (b) and a beam size. COPYRIGHT: (C)2005,JPO&NCIPI
|
