| 摘要 |
A container for a substrate is provided to maintain the cleanness of the substrate in the container by opening a portion of an entrance when a cover of the container is closed. A container(2) includes a first opening on one side thereof and a second opening on the other side spaced away from the first opening in a horizontal direction. The container has a rectangular cross section. The first opening is configured as an entrance for incoming and outgoing the substrate one-by-one. A fan filter unit(64) ventilates air from the second opening to the first opening. The fan filter unit is installed on a region of the second opening in the container. A cover(65) is formed on a region of the entrance of the container to open and close the entrance upon being closed under the state of opening a portion of the entrance as a ventilation hole. The ventilation hole is formed with a slit type.
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