发明名称 FUSED NANOCRYSTAL THIN FILM SEMICONDUCTOR AND METHOD
摘要 A thin film semiconductor 400, 410, 412 and a method 100, 300 of its fabrication use induced 120, 330 crystallization and aggregation of a nanocrystal seed layer 230 to form a merged-domain layer 250, 404. The nanocrystal seed layer 230 is deposited 1 10 onto a substrate 210, 402 surface within a defined boundary. A reaction temperature below a boiling point of a reaction solution is employed. A thin film metaloxide transistor 410 and a method 300 of its production employ the thin film semiconductor 400 as a channel 412 of the transistor 410. The merged-domain layer 250, 404 exhibits high carrier mobility.
申请公布号 WO2008045099(A3) 申请公布日期 2008.07.17
申请号 WO2006US41478 申请日期 2006.10.24
申请人 PAN, ALFRED, I-TSUNG;NG, HOU, T. 发明人 NG, HOU, T.
分类号 H01L29/06;H01L21/336;H01L29/786 主分类号 H01L29/06
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