| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe capable of performing fine control of scrubbing operation, and coping with a narrow pitch pad dispensing with cleaning. SOLUTION: This probe assembly is equipped with a z-deformation part springily deformable in the vertical direction; a tip contact member having a contact part whose section is formed in a bent shape, connected and supported by the tip par of the z-deformation part through an arm member, and deformable in the vertical direction and rotationally movable in the state where the contact part is in contact with an electrode pad; and a stopper for regulating movement of the tip contact member. When a fixed rotational movement amount of the tip contact member passes on an elongation in the rotation direction of the tip contact member resulting from a pushing pressure with the electrode pad, the stopper regulates motion of the tip contact member so that only rotating action thereafter is prevented, and that action in the vertical direction is not prevented. COPYRIGHT: (C)2008,JPO&INPIT
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