AMORPHOUS-CARBON-BASED HARD MULTILAYER FILM AND HARD SURFACE MEMBER HAVING THE FILM ON SURFACE

摘要

An amorphous carbon hard multilayer and a hard surface member equipped in the same are provided to improve the adhesive property between the amorphous carbon film and substrate. An amorphous carbon hard multilayer comprises: a foundation layer formed in substrate; a surface layer formed in the surface; and a concentration degradation layer formed between the foundation layer and surface layer. The foundation layer contains nitride or the carbon-nitride of the element M. The surface layer has the amorphous carbon film containing Carbon more than 50at%. If the element M and nitrogen are reduced from the foundation layer towards the amorphous carbon film, the carbon is increased.