| 摘要 |
A laser processing device and a laser processing method are provided to maintain processing quality by forming conductive films together by changing a processing condition by using a slit with a crystal shape in response to a wiring pattern of the object. A mask(20) has a slit defining the shape of a laser beam irradiated to a substrate(15). An optical system images the laser beam with a predetermined shape on the substrate. A fuel gas supply unit supplies the source gas of a laser chemical vapor deposition method to the substrate. A condition selecting member(21) selects a first condition and a second condition about the laser output and a processing time. The laser output in the second condition is lower than the laser output in the first condition. The processing time in the second condition is longer than the processing time in the first condition.
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