DISPLACEMENT SENSOR, DISPLACEMENT DETECTION DEVICE, AND DISPLACEMENT DETECTION METHOD

摘要

The present invention is provided with a light projection unit for projecting irradiation light toward a surface to be detected of an object to be detected, an objective optical system for concentrating the irradiation light onto the surface to be detected and taking in irradiation light that has been diffusely reflected by the surface to be detected, a light-blocking plate having formed therein a plurality of openings for respectively allowing a plurality of parts of transmission light taken in by the objective optical system to pass, an imaging unit for photographing an image, a plurality of focusing optical systems for focusing each of the plurality of parts of the transmission light taken in by the objective optical system on the imaging unit, and a signal processing unit for calculating the distance from the surface to be detected on the basis of the brightness centers of each of the spots imaged by the imaging unit.