Method for fabricating light-emitting element using chamber with mass spectrometer

摘要

A light-emitting element and its fabrication method are provided. The light-emitting element includes an EL layer between a pair of electrode, and the EL layer is formed by evaporation of an organic compound. The evaporation is conducted so that the partial pressure of a component with a specific molecular weight in a film-formation chamber, which is monitored by a mass spectrometer, does not exceed a specific value during the evaporation. This method allows the formation of a light-emitting element having an improved lifetime.

主权项

1. A method for fabricating a semiconductor device, the method comprising:
forming a film by evaporating an organic compound in a film-formation chamber, wherein a partial pressure of a component in the film-formation chamber is monitored during the evaporation by using a mass spectrometer, and wherein the component exhibits a m/z in a range from 46 to 200.