SINGLE CRYSTAL PULLING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a single crystal pulling device capable of preventing cooling capacity of a cooling cylinder from declining with time.SOLUTION: A pulling device of a single crystal includes: a main chamber in which a heating heater and a quartz crucible for accommodating raw material melt; a pulling chamber arranged on the main chamber; and a cooling cylinder that is extended from a ceiling part of the main chamber and arranged immediately above the raw material melt to cool a pulled-up single crystal rod. The cooling cylinder is equipped with a flow channel in which cooling water flows, and an observation device for observing the inside of the flow channel is installed at the tip of the raw material melt side of the flow channel.SELECTED DRAWING: Figure 1