发明名称 |
COMPOSITIONS AND METHODS FOR SEMICONDUCTOR PROCESSING AND DEVICES FORMED THEREFROM |
摘要 |
The present invention relates generally to the field of semiconductor devices, including solar cells, and compositions and methods for processing semiconductor devices, passivation of semiconductor surfaces, semiconductor etching and anti-reflective coatings for semiconductor devices. |
申请公布号 |
US2016181172(A1) |
申请公布日期 |
2016.06.23 |
申请号 |
US201514801881 |
申请日期 |
2015.07.17 |
申请人 |
Equity Solar, Inc. |
发明人 |
Mendiratta Arjun |
分类号 |
H01L23/29;H01L23/31;C09K13/08;H01L21/56 |
主分类号 |
H01L23/29 |
代理机构 |
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代理人 |
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主权项 |
1. A composition for treating a semiconductor surface, wherein the composition comprises:
(a) an oxidant, (b) a compound comprising fluorine, (c) one or more additives, and (d) water. |
地址 |
Greenbrae CA US |