发明名称 COMPOSITIONS AND METHODS FOR SEMICONDUCTOR PROCESSING AND DEVICES FORMED THEREFROM
摘要 The present invention relates generally to the field of semiconductor devices, including solar cells, and compositions and methods for processing semiconductor devices, passivation of semiconductor surfaces, semiconductor etching and anti-reflective coatings for semiconductor devices.
申请公布号 US2016181172(A1) 申请公布日期 2016.06.23
申请号 US201514801881 申请日期 2015.07.17
申请人 Equity Solar, Inc. 发明人 Mendiratta Arjun
分类号 H01L23/29;H01L23/31;C09K13/08;H01L21/56 主分类号 H01L23/29
代理机构 代理人
主权项 1. A composition for treating a semiconductor surface, wherein the composition comprises: (a) an oxidant, (b) a compound comprising fluorine, (c) one or more additives, and (d) water.
地址 Greenbrae CA US