发明名称 ELECTRO-ASSISTED TRANSFER AND FABRICATION OF WIRE ARRAYS
摘要 A fabrication method includes: (1) forming a wire array on a fabrication substrate; (2) forming a porous layer within a portion of the fabrication substrate below the wire array; (3) separating the porous layer and the wire array from a remaining portion of the fabrication substrate; and (4) affixing top ends of the wire array to a target substrate.
申请公布号 US2016181121(A1) 申请公布日期 2016.06.23
申请号 US201314907253 申请日期 2013.09.26
申请人 THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY 发明人 Weisse Jeffrey;Zheng Xiaolin
分类号 H01L21/326;H01L21/02 主分类号 H01L21/326
代理机构 代理人
主权项 1. A fabrication method, comprising: forming a wire array on a fabrication substrate; forming a porous layer within a portion of the fabrication substrate below the wire array; separating the porous layer and the wire array from a remaining portion of the fabrication substrate; and affixing top ends of the wire array to a target substrate.
地址 Palo Alto CA US