发明名称 |
ELECTRO-ASSISTED TRANSFER AND FABRICATION OF WIRE ARRAYS |
摘要 |
A fabrication method includes: (1) forming a wire array on a fabrication substrate; (2) forming a porous layer within a portion of the fabrication substrate below the wire array; (3) separating the porous layer and the wire array from a remaining portion of the fabrication substrate; and (4) affixing top ends of the wire array to a target substrate. |
申请公布号 |
US2016181121(A1) |
申请公布日期 |
2016.06.23 |
申请号 |
US201314907253 |
申请日期 |
2013.09.26 |
申请人 |
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
Weisse Jeffrey;Zheng Xiaolin |
分类号 |
H01L21/326;H01L21/02 |
主分类号 |
H01L21/326 |
代理机构 |
|
代理人 |
|
主权项 |
1. A fabrication method, comprising:
forming a wire array on a fabrication substrate; forming a porous layer within a portion of the fabrication substrate below the wire array; separating the porous layer and the wire array from a remaining portion of the fabrication substrate; and affixing top ends of the wire array to a target substrate. |
地址 |
Palo Alto CA US |