| 摘要 |
The present invention provides an examination device with which highly accurate detection of foreign matter is possible, the examination device comprising: a light source; an electrooptical element on which light from the light source impinges, and which changes the phase of the light to at least two states; and a control unit. The control unit is designed to use the intensity modulation characteristics of the electrooptical element, produced by varying the applied voltage inputted to the electrooptical element, so as to correct phase fluctuations of the electrooptical element itself. |
