| 摘要 |
<p>PURPOSE:To obtain the MIM element of a fine size having a stable characteristic by specifying the shape of a first electrode, an insulating film and a second electrode formed on a transparent insulating substrate. CONSTITUTION:In an active element (MIM element) having a non-linear resistance characteristic, as for the side face shape of the first electrode 3 on a transparent insulating substrate 1, an area 3a brought into contact with the transparent insulating substrate 1 of the first electrode 3 has an oblique face, and the remaining area 3b of the first electrode 3 has a roughly vertical shape. Also, the second electrode 9 formed on the first electrode 3 through an insulating film 2 is brought to parting in the part of the area 3b formed in a vertical shape of the first electrode 3. In such a way, the MIM element of a fine size can be obtained stably by a simple method which is not contaminated in the manufacturing process, and also, does not necessitate a special manufacturing device.</p> |
