发明名称 Methods to form and to dismantle hermetically sealed chambers
摘要 Embodiments generally relate to methods for forming and dismantling a hermetically sealed chamber. In one embodiment, the method comprises using room temperature laser bonding to create a hermetic seal between a first element and a second element to form a chamber. A bond interface of the hermetic seal is configured to allow the hermetic seal to be opened under controlled conditions using a release technique. In one embodiment, the chamber is formed within a microfluidic chip and the chamber is configured to hold a fluid. In one embodiment a chip comprises a first hermetic seal bonding first and second elements to create a first chamber and a second hermetic seal bonding third and fourth elements to create a second chamber encompassing the first chamber. The first hermetic seal may be broken open independently of the second hermetic seal by the application of a mechanical or thermal technique.
申请公布号 US9440424(B2) 申请公布日期 2016.09.13
申请号 US201414270265 申请日期 2014.05.05
申请人 Picosys Inc 发明人 Karam Raymond Miller;Wynne Thomas;Chobot Anthony Thomas
分类号 H01L23/04;B32B43/00;B32B38/00 主分类号 H01L23/04
代理机构 代理人 Venkatesh Shalini
主权项 1. A method for forming a hermetically sealed chamber, the method comprising: using room temperature laser bonding to create a hermetic seal between a first element and a second element to form the chamber; wherein a bond interface of the hermetic seal is configured to allow the hermetic seal to be broken open under controlled conditions using a release technique; wherein the chamber is formed within is a microfluidic chip comprising a via connected to the chamber; and wherein the chamber is configured to hold a fluid.
地址 Santa Barbara CA US