Procédé de formation d'un revêtement céramique sur un substrat en présence d'ozone.,申请号FR19910000565-传众专利搜索

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发明名称	Procédé de formation d'un revêtement céramique sur un substrat en présence d'ozone.
摘要
申请公布号	FR2697852(B1)	申请公布日期	1996.11.15
申请号	FR19910000565	申请日期	1991.01.18
申请人	DOW CORNING CORP	发明人	HALUSKA LOREN ANDREW
分类号	C04B41/49;H01L21/314;H01L21/316;H01L23/29;(IPC1-7):C23C16/22;C23C16/44;C04B35/00	主分类号	C04B41/49
代理机构		代理人
主权项
地址

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