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经营范围
发明名称
HANDLING OF SEMICONDUCTOR WAFER
摘要
申请公布号
JPS5565434(A)
申请公布日期
1980.05.16
申请号
JP19780138862
申请日期
1978.11.13
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
TOBIOKA FUMIO;TAKEZAKI YUKIYA;KITANE SHIYOUICHI
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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