摘要 |
PURPOSE:To obtain an SiC-based material at a low cost by forming a thin silica coating film on the surface of an SiC sintered body, coating the film with a specified mixture and forming high purity silica by heating. CONSTITUTION:An SiC sintered body produced by an arbitrary method such as a reactive sintering method is heated to >=800 deg.C in the air or in an oxidizing atmosphere to form a thin silica coating film of several mum to several hundred mum thickness by oxidation on the surface of the sintered body. The silica coating film is coated with a mixture of high purity silica powder with carbon powder or a carbonizable org. substance such as phenol resin and the mixture is dried and heated to the melting temp. of silica or above (>=1,730 deg.C) in a nonoxidizing atmosphere. By this heating, the silica and carbon are brought into a reaction to form high purity SiC. |