发明名称 Semiconductor chips measuring needle centre
摘要 A needle centre to check the dimensions of semiconductor chips on a wafer and withput bond connecting wires consists of six radial insulated measuring needles (2a-2f), made of W which can be entirely or partly Au plated. They are fixed between the conical surface of a cone (1) and a conical ring (4) and are embedded in an insulating adhesive (1). The latter has an epoxy resin basis. The cone should be made of a metal with the same temp. coefft. as the ring and the needles. The ring is made of anodised Al.
申请公布号 DE3937105(A1) 申请公布日期 1990.05.31
申请号 DE19893937105 申请日期 1989.11.07
申请人 LGZ LANDIS & GYR ZUG AG, ZUG, CH 发明人 SCHNEIDER, GERNOT, EL.ING.(GRAD.), BAAR, CH;STOCKER, HANSUELI, IMMENSEE, CH
分类号 G01R1/073 主分类号 G01R1/073
代理机构 代理人
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