| 摘要 |
PURPOSE:To obtain a biosensor having high sensitivity and high reliability by forming a monomolecular film contg. Si on a gate electrode of an FET by a prescribed method and fixing protein or enzyme thereto after a chemical treatment. CONSTITUTION:A resist 3 is coated on a substrate 2 on which the FET1 if preliminarily formed. The resist is exposed and developed only on the gate electrode 4 so that said part is opened. A silane surface active agent, for example, CH2=CH-9CH2)-SiCl3 is chemically adsorbed to the aperture formed in such a manner. The oxygen of the gate electrode surface and -SiCl3 react selectively to form the monomolecular film 5 of CH2=CH-(CH2)n-Si(-)=O=. The substrate is immersed in a THF soln. of diborane after the removal of the resist pattern 3, then an OH group is added to the vinyl group or aldehyde group on the surface. The substrate is immersed in an aq. periodic acid soln. to oxide the OH group on the surface to an aldehyde group. The protein or enzyme having the specific activity is fixed thereby by an addition reaction. Such substrate 2 is subjected to dicing and connecting of electrodes, etc., by which the biosensor is completed. |
