| 摘要 |
PURPOSE:To provide a laser encoder having sufficient durability both chemically and mechanically, and capable of maintaining high reflectance, and further provide a method for manufacturing such an encoder. CONSTITUTION:The surface of an encoder substrate 1 is washed with an optical shower method, before a magnetic substance or the like constituting a diffraction grating 2 is applied to the surface. After the application of the magnetic substance, the diffraction grating 2 is formed, and Cu, Ag or Au as a highly reflective film 3 is formed on the surface of the grating 2 with a vacuum film formation method. Furthermore, a transparent amorphous fluororesin protective film 4 is formed on the film 3. |
