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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPH07331440(A)
申请公布日期
1995.12.19
申请号
JP19940124913
申请日期
1994.06.07
申请人
KAO CORP
发明人
KITAORI NORIYUKI;YOSHIDA OSAMU;MIZUNOYA HIROHIDE;WAKABAYASHI SHIGEMI;SHIGA AKIRA
分类号
C23C16/26;C23C16/27;C23C16/50;C23C16/511;G11B5/72;G11B5/84;(IPC1-7):C23C16/26
主分类号
C23C16/26
代理机构
代理人
主权项
地址
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