THIN FILM FORMING DEVICE AND METHOD OF FORMING THIN FILM,申请号JP19940192610-传众专利搜索

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发明名称	THIN FILM FORMING DEVICE AND METHOD OF FORMING THIN FILM
摘要
申请公布号	JPH0855821(A)	申请公布日期	1996.02.27
申请号	JP19940192610	申请日期	1994.08.16
申请人	NEC CORP	发明人	TSUNENARI KINJI
分类号	C23C14/28;H01L21/285;(IPC1-7):H01L21/285	主分类号	C23C14/28
代理机构		代理人
主权项
地址

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