| 摘要 |
<p>PURPOSE: To easily control the accuracy in the direction of thickness of a part while keeping highly its protection stability through protective coating and further smoothen the surface of the protective coating so as to eliminate the chucking error due to vacuum chucking. CONSTITUTION: In every square unit area surrounded by split grooves on a substrate 1 on which grid-like split grooves are formed by vertical and horizontal slits are formed on both end parts of every unit area and a resistance film 3 is formed in a manner to cover both films 2, then an undercoating layer 4 is formed in every unit area to cover the respective films 3. After the respective films 3 is trimmed from the upper side of the undercoating layer with a laser beam, a medium coating layer 5 is formed in every unit area, and an overcoating layer 5 is formed in every unit area. Finally, the substrate 1 is separated along the respective split grooves into unit chips.</p> |
