发明名称 |
METHOD FOR MANUFACTURING INTEGRATED CIRCUIT, AND METHOD FOR REPLENISHING BOTH DIFFUSION AND SEGREGATION OF BORON FROM CHANNEL AND FIELD REGIONS TO SOURCE AND DRAIN REGIONS ADJACENT THERETO |
摘要 |
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申请公布号 |
JPH08330587(A) |
申请公布日期 |
1996.12.13 |
申请号 |
JP19960051480 |
申请日期 |
1996.03.08 |
申请人 |
ADVANCED MICRO DEVICDS INC |
发明人 |
MOHAMETSUDO ANJIYUUMU;KURAUSU EICHI KUUPU;MANGU EICHI KIYAU |
分类号 |
H01L21/265;H01L21/336;H01L29/423;H01L29/78;(IPC1-7):H01L29/78 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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