Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations,申请号EP19930305095-传众专利搜索

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发明名称	Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations
摘要
申请公布号	EP0577399(B1)	申请公布日期	1998.01.14
申请号	EP19930305095	申请日期	1993.06.29
申请人	IPEC PRECISION, INC.	发明人	LEDGER, ANTHONY M.
分类号	G01B11/06;(IPC1-7):G01B11/06	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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