| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
ITOH, KUNIO, TAKASAKI-SHI, GUNMA-KEN, JP;SHINOHARA, TOSHIO, TAKASAKI-SHI, GUNMA-KEN, JP;KIZAKI, HIROAKI, ANNAKA-SHI, GUNMA-KEN, JP;TANAKA, SHOICHI, ANNAKA-SHI, GUNMA-KEN, JP;SATOU, YUKINORI, ANNAKA-SHI, GUNMA-KEN, JP;UMEMURA, KAZUNOBU, ANNAKA-SHI, GUNMA-KEN, JP |
