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发明名称
Hochpräziser piezoelektrischer Antrieb
摘要
申请公布号
DE69604023(D1)
申请公布日期
1999.10.07
申请号
DE19966004023
申请日期
1996.06.20
申请人
CSEM CENTRE SUISSE D`ELECTRONIQUE ET DE MICROTECHNIQUE S.A. - RECHERCHE ET DEVELOPPEMENT, NEUCHATEL
发明人
NIEDERMANN, PHILIPPE;CHOFFAT, HUBERT
分类号
H01L41/09;(IPC1-7):H01L41/09;H02N2/02
主分类号
H01L41/09
代理机构
代理人
主权项
地址
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