发明名称 Solar cell production comprises etching tiny concave and convex surface patterns on a silicon substrate by immersion in an aqueous sodium carbonate solution
摘要 Solar cell production, comprising etching of tiny concave and convex surface patterns on a silicon substrate by immersion in an aqueous sodium carbonate solution, is new. Preferred Features: The etching solution is an aqueous 8-23 wt.% Na2CO3 solution, optionally mixed with an aqueous NaOH solution and/or an aqueous NaHCO3 solution, and is used at 80-100 deg C.
申请公布号 DE19922547(A1) 申请公布日期 2000.06.29
申请号 DE1999122547 申请日期 1999.05.10
申请人 MITSUBISHI DENKI K.K., TOKIO/TOKYO 发明人 NISHIMOTO, YOICHIRO
分类号 H01L31/04;H01L21/306;H01L31/0236;(IPC1-7):H01L31/18;C23F1/32 主分类号 H01L31/04
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